WW-CMP-101
Ultra-miniature proportional valves
Compact proportional gas valves for small analytical instruments and portable monitoring equipment.
View productPrecision components
Gas mass flow controllers
Mass flow controllers combining a MEMS flow sensor, proportional valve and digital control electronics. The family supports controlled gas delivery for analysis, dilution and process applications. Analog and RS485 signals provide control and measurement connections, with gas type and full-scale flow selected for each installation.
Applications
- Gas dilution
- Analytical instruments
- Bioprocess flow control
- Semiconductor processes
Specifications
| Measurement method | MEMS |
|---|---|
| Accuracy | ≤±1% FS |
| Interface | 0–5 VDC / RS485 |
| Power supply | 24 VDC / <2.4 W |
| Operating temperature | 5–40 °C |
Specifications may vary by model and configuration. Contact us to confirm suitability for your application.
Manufacturer: Sheens
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